# MKS Mass-Flo Controller M100B01522CS1BV - 200 sccm CF4 Gas

The **Mass-Flo Controller M100B01522CS1BV** by MKS Instruments is engineered for precision and reliability in industrial applications. This flow controller, designed for 200 sccm of CF4 gas, offers exceptional accuracy for critical processes. Ideal for the semiconductor industry and research laboratories, this controller ensures optimal performance and efficiency. The **M100B01522CS1BV** incorporates advanced MKS technology, providing dependable flow control.

This controller's design supports a wide range of applications, ensuring consistent and precise gas flow. It is built to meet the highest standards of quality and efficiency. The user-friendly design makes it easy to set up and operate, saving you time and effort in your workflow. The **M100B01522CS1BV** weighs in at 820 grams, making it lightweight yet durable, suitable for various industrial environments. The U.S. patent number 5672821 highlights its innovative design.

-   **Precise Flow Control:** Delivers accurate 200 sccm flow of CF4 gas.
-   **Reliable Performance:** Ensures consistent results in demanding environments.
-   **User-Friendly Design:** Simplifies setup and operation for enhanced workflow.
-   **Industrial Grade:** Built for durability and long-term reliability.

The **Mass-Flo Controller M100B01522CS1BV** is a critical component for achieving optimal results in industrial and research settings. With its advanced features and reliable performance, this controller is a valuable asset for any business seeking to enhance productivity. Trust in MKS technology to optimize your automation systems.

For inquiries, contact Ram Automations at [info@ramautomations.com](mailto:info@ramautomations.com).

## Details

- **Price:** 999.0 USD
- **Vendor:** MKS Instruments
- **Type:** Industrial Automation > Flow Control > Mass Flow Controller
- **Tags:** CF4 gas flow, industrial automation, M100B01522CS1BV, mass flow controller, MKS Instruments, semiconductor equipment

## Variants

| Variant | Price | Available |
|---------|-------|-----------|
| New | 999.00 USD | In stock |

## Images

- MKS Mass-Flo Controller M100B01522CS1BV - 200 sccm CF4 Gas-Ram Automations

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> Source: [Ram Automations](https://ramautomations.com/products/mks-m100b01522cs1bv-controller)
> Updated: 2026-09-22