# MKS M100B06323CS1BV Mass Flow Controller - CF4 Gas

The **MKS M100B06323CS1BV Mass Flow Controller**, manufactured by MKS Instruments Inc., is a high-precision instrument designed for accurate gas flow control in industrial applications. This controller is specifically engineered for use with CF4 gas, ensuring optimal performance and reliability in demanding environments. Its robust design and precise calibration make it an invaluable tool for various processes.

This mass flow controller boasts a flow range of 2000 sccm, making it suitable for a wide range of applications. Protected under U.S. Patent No. 5672821, the **MKS M100B06323CS1BV** offers exceptional quality and performance. With a weight of 860 grams, it is lightweight and easy to integrate, providing precise gas flow control. The **M100B06323CS1BV** is a dependable solution for applications requiring accuracy and control. The **MKS Instruments** is a leading manufacturer in the automation components industry.

Key Features:

-   **Precise Flow Control:** Ensures accurate gas flow regulation for optimal process performance.
-   **CF4 Gas Compatibility:** Specifically calibrated for use with CF4 gas.
-   **Wide Flow Range:** Offers a flow range of 2000 sccm to accommodate various application needs.
-   **Durable Construction:** Built to withstand industrial environments, ensuring long-term reliability.
-   **Lightweight Design:** Facilitates easy handling and integration into existing systems.

Specifications:

Flow Range: 2000 sccm  
Gas Compatibility: CF4  
Weight: 860 grams

The **MKS M100B06323CS1BV** mass flow controller delivers unparalleled precision and reliability, making it an excellent choice for industrial automation systems. Trust **MKS Instruments** and **Ram Automations** for high-quality components that enhance your operational efficiency. For any inquiries, you can contact us at [info@ramautomations.com](mailto:info@ramautomations.com).

## Details

- **Price:** 999.0 USD
- **Vendor:** MKS Instruments
- **Type:** Industrial Automation > Flow Control > Mass Flow Controller
- **Tags:** 2000 sccm, CF4 gas, flow controller, gas flow control, industrial automation, M100B06323CS1BV, mass flow controller, MKS, MKS Instruments

## Variants

| Variant | Price | Available |
|---------|-------|-----------|
| New | 999.00 USD | In stock |

## Images

- MKS M100B06323CS1BV Mass Flow Controller - CF4 Gas-Ram Automations

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> Source: [Ram Automations](https://ramautomations.com/products/mks-m100b06323cs1bv-mass-flow)
> Updated: 2026-09-18